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Nanotechnology-Related Patents

 

 

 

 

U.S. Patent No.

Title

Issue Date

6,653,030 B2

 

 

 

 

 

 

Optical-Mechanical Feature Fabrication During Manufacture of Semiconductors and Other Micro-Devices and Nano-Devices That Include Micron and Sub-Micron Features

 

November 25, 2003

 

 

 

 

 

 

 

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